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I want to batch align and process 200 photos, but PS shows that the temporary disk is insufficient. What should I do? The RAM is 64GB.Windows system.
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How much free disk space do you have for the Photoshop scratch disk? That is much more important than RAM.
For most normal work, and all kinds of volume processing, you should have at least 200GB free space, preferably more.
Raster image editing requires huge amounts of memory, much more than any RAM you may have installed. So temporary working data are written to disk, aka the scratch disk. The scratch file contains all history states or all open documents plus some overhead.
For batches, write the action so that one image closes before the next opens. That dramatically reduces the scratch disk requirement.